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In page Vacuum tube:

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Vacuum tubes are practical alternatives to solid-state devices in generating high power at radio frequencies in applications such as industrial radio frequency heating, particle accelerators, and broadcast transmitters. This is particularly true at microwave frequencies where such devices as the klystron and traveling-wave tube provide amplification at power levels unattainable using current semiconductor devices. The household microwave oven uses a magnetron tube to efficiently generate hundreds of watts of microwave power. Solid-state devices such as gallium nitride are promising replacements, but are very expensive and in early stages of development.[citation needed]