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In page Ultraviolet:

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Gas lasers, laser diodes, and solid-state lasers can be manufactured to emit ultraviolet rays, and lasers are available that cover the entire UV range. The nitrogen gas laser uses electronic excitation of nitrogen molecules to emit a beam that is mostly UV. The strongest ultraviolet lines are at 337.1 nm and 357.6 nm in wavelength. Another type of high-power gas lasers are excimer lasers. They are widely used lasers emitting in ultraviolet and vacuum ultraviolet wavelength ranges. Presently, UV argon-fluoride excimer lasers operating at 193 nm are routinely used in integrated circuit production by photolithography. The current wavelength limit of production of coherent UV is about 126 nm, characteristic of the Ar2* excimer laser.[citation needed]