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In page Vacuum pump:

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Several types of pumps may be used in sequence or in parallel. In a typical pumpdown sequence, a positive displacement pump would be used to remove most of the gas from a chamber, starting from atmosphere (760 Torr, 101 kPa) to 25 Torr (3 kPa). Then a sorption pump would be used to bring the pressure down to 10−4 Torr (10 mPa). A cryopump or turbomolecular pump would be used to bring the pressure further down to 10−8 Torr (1 μPa). An additional ion pump can be started below 10−6 Torr to remove gases which are not adequately handled by a cryopump or turbo pump, such as helium or hydrogen.[citation needed]