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In page Herbivore:

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During the next 75 million years[citation needed], plants evolved a range of more complex organs, such as roots and seeds. There is no evidence of any organism being fed upon until the middle-late Mississippian, 330.3 million years ago. There was a gap of 50 to 100 million years between the time each organ evolved and the time organisms evolved to feed upon them; this may be due to the low levels of oxygen during this period, which may have suppressed evolution.[2] Further than their arthropod status, the identity of these early herbivores is uncertain.[2] Hole feeding and skeletonization are recorded in the early Permian, with surface fluid feeding evolving by the end of that period.[1]