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In page Nanotechnology:

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The emergence of nanotechnology as a field in the 1980s occurred through the convergence of Drexler's theoretical and public work, which developed and popularized a conceptual framework, and experimental advances that drew additional attention to the prospects[citation needed]. In the 1980s, two breakthroughs helped to spark the growth of nanotechnology. First, the invention of the scanning tunneling microscope in 1981 enabled visualization of individual atoms and bonds, and was successfully used to manipulate individual atoms in 1989. The microscope's developers Gerd Binnig and Heinrich Rohrer at IBM Zurich Research Laboratory received a Nobel Prize in Physics in 1986.[2][3] Binnig, Quate and Gerber also invented the analogous atomic force microscope that year.