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In page Diffusion pump:
"Following his invention of the molecular pump, Wolfgang Gaede invented the diffusion pump in 1915,[1] and originally used elemental mercury as the working fluid. After its invention, the design was quickly commercialized by Leybold.[2] It was then improved by Irving Langmuir,[3] and W. Crawford.[citation needed] C.R. Burch described the possibility of using silicone oil in 1928.[4]
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